Download citation fundamentals of laser micromachining due to their flexible. Wang department of electrical engineering, the hong kong polytechnic university, hung hom, kowloon, hong kong, p. Femtosecond laser micromachining system femtofab is a turnkey laser machine designed for specific industrial process. The first femtosecond laser written waveguide laser was fabricated in an er. Femtosecond laser micromachining of advanced fiber optic. Migration of labonchip configurations into the optical fiber platform opens the revolutionary prospect of labinfiber systems on the basis of an efficient optical transport highway for multifunctional sensing. Femtosecond laser ablation has shown to be effective at machining various. Ultrafast lasers are primarily utilized in applications where the required haz and quality cannot be achieved by a traditional cw or long pulsed fiber or nanosecond and picosecond laser systems. Optofluidic microlasers based on femtosecond micromachining. Ya cheng femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. Learn more about our femtosecond laser micromachining capabilities. The ultrashortpulse laser machining systems were developed to.
Ultrashort laser pulses with durations in the femtosecond range up to a few picoseconds provide a unique method for the structuring of practically all materials with high precision and minimal thermal and mechanical influence of the surrounding. Computergenerated volume holograms fabricated by femtosecond. The doping concentration was 2% in weight of erbium and 4% in weight of ytterbium, and 20 mm long waveguides were fabricated. The software provides userfriendly interface and intuitive access to all systems functionality including the laser, motion stages, scanner.
What we mean by ultra precise femtosecond laser micro. Octaided femtosecond laser micromachining device 2009. The pico and femtosecond laser micromachining has grown up as a reliable. Published 28 january 2008 2008 iop publishing ltd journal of micromechanics and microengineering, volume 18, number 3. Dear colleagues, femtosecond lasers are a formidable micromachining tool, applicable to a variety of materials. Femtosecond laser micromachining of microstructures for.
A laser operated in this way is sometimes referred to as a femtosecond laser, for example in modern refractive surgery. Ya cheng is an active researcher in the ultrafast photonics related fields, including femtosecond laser micromachining, ultrafast nonlinear optics and strong field laser physics. It is a maskless technology that allows rapid device prototyping, has intrinsic threedimensional. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned. Femtosecond laser micromachining photonic and microfluidic. Compared with conventional sensors with bulky assemblies, recent process in femtosecond fs laser threedimensional 3d micro and even nanoscale. Osa infiber whisperinggallerymode resonator fabricated. Micromachining of photonic devices by femtosecond laser. We report on fabrication of whisperinggallerymode microlasers in a nd. Modelocking is a technique in optics by which a laser can be made to produce pulses of light of extremely short duration, on the order of picoseconds 10. Quality factor on the order of 103 is achieved by smoothing the cavity surface with. It is a maskless technology that allows rapid device prototyping, has intrinsic threedimensional capabilities and can produce both photonic and microfluidic devices.
The software provides userfriendly interface and intuitive access to all systems functionality including. This spatial light modulation scheme is extensible to offplane waveguide holography via the integration of a bragg reflection grating. It is a maskless technology that allows rapid device prototyping, has intrinsic threedimensional capabilities and can produce both photonic and. Femtosecond laser micromachining of dielectric materials. Reference module in materials science and materials engineering. Laser micromachining technologies have revolutionized manufacturing in microelectronics, semiconductor, photovoltaics, led, medical device.
Request pdf laser micromachining for transparent materials this article. The main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by co2 laser annealing for surface smoothing. A series of high performance assemblyfree, alloptical fiber sensor probes operated in a reflection configuration were proposed and fabricated. Microengineered optical fiber sensors fabricated by. Femtowriter micromachining system sintec optronics. The basis of the technique is to induce a fixedphase relationship between the. Koji sugioka is a senior research scientist at riken and a guest professor at tokyo university of science and tokyo denki university, japan. Microstructures in optical fiber created by femtosecond laser micromachining can. Part of the topics in applied physics book series tap, volume 123. Laser micromachining for transparent materials request pdf. Quality factor on the order of 103 is achieved by smoothing the cavity surface with an ultrasonic. Read femtosecond laser 3d micromachining for microfluidic and optofluidic applications by koji sugioka available from rakuten kobo. The cylinder resonator cavity is fabricated by scanning the dfiber cladding with infrared femtosecond pulses along a cylindrical trace with a radius of 25.
Because our femtosecond laser micro machining system yields such smooth cuts, we are able to make incredibly small features, and when paired with our multi axis nano motion stage capabilities, we can output super intricate features in 3 dimensions, with results depending mostly on how fine a grain that the substrate has. Wang, ying wang, changrui liao, long period fiber grating formed by periodically structured microholes in allsolid photonic bandgap fiber, opt. Femtosecond laser micromachining has emerged in recent years as a new technique for micronano structure fabrication because of its applicability to virtually all kinds of materials in an easy onestep process that is scalable. Whether your requirement is for an industrial grade manufacturing tool or a system dedicated to research, we have an array of laser micromachining products with which to configure the perfect laser micromachining solution to match your needs. It is a maskless technology that allows rapid device prototyping, has intrinsic threedimensional capabilities and. Femtosecond laser micromachining can be used either to remove materials or to change a materials properties, and can be applied to both absorptive and. Femtosecond laser micromachining of dielectric materials for biomedical applications. Configuration is selected and carefully tuned according to a specific laser micromachining application. Femtosecond laser micromachining of aluminium left and steel right. Laser micromachining has been used to produce controllable microsubmicropatterns on silicon wafer that is used to replicate the patterns on polymer surfaces. We define computergenerated volume holograms cgvhs as arbitrary 3d refractive index modulations designed to perform optical functions based on diffraction, scattering, and interference phenomena. Femtosecond lasers for material processing and micromachining. We present the different optofluidic lasers which have been realized using the femtosecond micromachining technique to fabricate the monolithic optofluidic.
Hardglass manufacturing, thin film patterning, and lithium ion battery electrode structuring are femtosecond laser processing examples. The fdoct offers noninvasive imaging at an axial resolution of 6, 2. Ybdoped phosphate glass kigre qx by means of a frequencydoubled cavitydumped yb. Deepak rajput is a phd graduate student of materials science at the university of tennessee space institute at tullahoma. This industrial femtosecond laser system features 10 w average power at 100 khz and is ideal for high throughput micromachining. Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and. Microengineered optical fiber sensors fabricated by femtosecond laser micromachining d. Femtosecond laser is the last step in laser micromachining research, through this high precision can be achieved with ultrashort pulse lasers suitable for micron features 15 16.
A range of infra red, visible and ultra violet laser sources give fast machining of a wide range of materials. Siliconbased micromachining process for flexible electronics. The short duration of a femtosecond pulse leads to high peak powers and very high intensities even for low pulse energies. Equipped with high power and high energy femtosecond fiber laser, this system is capable of manufacturing various materials with high precision. Femtosecond laser patterning of the biopolymer chitosan for.
Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfluidic, optofludic and labonachip devices and thereby many researches on this topic are currently being carried out. In recent years, femtosecond laser micromachining techniques have been used in a broad range of optical fiber applications. He is a professor of the shanghai institute of optics and fine mechanics siom, chinese academy of sciences, and the deputy director of the state key laboratory of high field laser physics. Microprocessing is an expanding market for laser sources both displacing nonlaser processes and opening new applications. Femtowriter laser micromachining system provides the most flexibility in a single laser micromachining platform. The class 1 enclosure deals with all laser safety issues and the vibration isolated platform helps to maintain the quality of the parts. Femtosecond laser an overview sciencedirect topics. Fabrication of micronano structures on metals by femtosecond. Annotation this volume describes stateoftheart micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique threedimensional. What we mean by ultra precise femtosecond laser micro machining. Our laser micromachining products industrial laser micromachining tools and research laser micromachining systems. Laser micromachining services provider resonetics has acquired precision grinding services supplier tru tech systems. Infiber whisperinggallerymode resonator fabricated by. Pdf pico and femtosecond laser micromachining for surface.
The resolution since then has improved to machine nanometer sized features. Osa lowthreshold whisperinggallerymode microlasers. Koji sugioka, a jian xu, a dong wu, a yasutaka hanada, b zhongke wang, c ya cheng d and katsumi midorikawa a. Picosecond laser micromachining of tungsten carbide highquality microfeatures and patterns can be machined costeffectively with process flexibility using picosecond lasers. Although most of the papers using surface modification by laser technologies are focused on studying cell. Since he joined riken in 1986, he has been working on laser materials processing. Its compact size, high performance and low capital investment make it an ideal source for your ultrafast laser needs. Pico and femtosecond laser micromachining for surface texturing.
Research and development in photonic micronano structures functioned as sensors and devices have experienced significant growth in recent years, fueled by their broad applications in the fields of physical, chemical and biological quantities. Energy industrial fslaser for micromachining the rapid fx is an industrial femtosecond laser system designed and manufactured for 247 use under wide environmental conditions. Reber, and rafael piestun, computergenerated volume holograms fabricated by femtosecond laser micromachining, opt. Femtosecond laser micromachining applications ipg photonics. Femtosecond laser micromachining of nextgeneration. Different fs laser micromachining techniques were investigated for different purposes, such as fs laser direct ablating, fs laser irradiation with chemical etching flice and laser induced stresses. The pulses are amplified and conditioned in a thermally stable amplifier with superior beam quality. Femtosecond laser 3d micromachining for microfluidic and optofluidic applications. He received his phd in electronics from waseda university, japan, in 1993. Another approach to achieve controlled surface textures is femtosecond laser micromachining 18,19, which is advantageous in comparison to similar methods because it involves a direct, singlestep and maskless procedure 20,21,22,23. System is protected by class 1 equivalent laser safety enclosure and controlled through advanced sca engineer software window.
Femtosecond laser micromachining in transparent materials. Dave f farson 1, hae woon choi 1, burr zimmerman 2, jeremy k steach 3, jeffery j chalmers 2, susan v olesik 3 and l james lee 2. Osa computergenerated volume holograms fabricated by. Femtosecond laser micromachining first demonstrated in 1994 by du et al followed by pronko et al in 1995 to ablate micrometer sized features. In particular, femtosecond laser processing has shown unique capabilities in altering the optical properties of the bulk of transparent dielectric substrates in a permanent fashion and with a micrometric resolution, thus allowing the manufacture of innovative integrated devices for. It can be seen from figure 2 that even with metals such as stainless steel, which are relatively difficult to laser machine. The pico and femtosecond laser micromachining has grown up as a reliable tool for precise manufacturing and electronic industries to make fine drilling and machining into hard metals and ceramics as well as soft plastic and to form various nano and microtextures for improvement of surface functions and properties in products. In this way, femtosecond laser machining avoids the thermal damage associated with traditional machining techniques laser, edm, hard tool, etc. Pico and femtosecond laser micromachining for surface.
Femtosecond laser micromachining can be used either to remove materials or to change a materials properties, and can be applied to both absorptive and transparent substances. Laser micromachining is a versatile process and is used widely for machining plastic, glass. Diadem ultrafast femtosecond laser is well suited for year round 247 operating environments. Advantages of femtosecond laser micromachining flm. An infiber whisperinggallerymode resonator fabricated by femtosecond laser micromachining is demonstrated. It is a maskless technology that allows rapid device prototyping, has intrinsic threedimensional capabilities and can.
The book combines background on physics, lasers, optics, and hardware with. Looking for a laser micromachining system with high precision and wallplug efficiency. Femtosecond laser micromachining of transparent material is a powerful and versatile. Most o f them utilize the nanosecond solidstate oscillator s and make thermal machin ing of materials. Femtosecond laser micromachining workstation femtofab.
Femtosecond laser micromachining of dielectric materials for. We have previously introduced a femtosecond laser micromachiningbased scheme for the fabrication of anisotropic waveguides in lithium niobate for use in a guidedwave acoustooptic spatial light modulator. Femtosecond laser micromachining biological devices. An efficient method to overcome the abovementioned difficulty is to use a femtosecond laser. We show a combined system of a fslaser and a fourierdomain optical coherence tomography fdoct enabling to cut and image the region of interest alternately.
As explained, the main mechanism behind the femtosecond laser surface modification is multiphoton phenomenon and nonthermal processes. The yfi laser series is a family of high average power, high repetition rate nearir ultrafast fiber lasers. Laser micromachining an overview sciencedirect topics. Cgvhs can differ dramatically from classical volume holograms in terms of coding possibilities, and from thin computergenerated holograms in terms of efficiency and selectivity. The air cavity is fabricated by using femtosecond laser micromachining together with the fusion splicing technique. A presentation on femtosecond laser micromachining made by deepak rajput. Laser micromachining technologies have revolutionized manufacturing in microelectronics, semiconductor, photovoltaics, led, medical device fabrication and many other industries. Both pulsetopulse energy stability and beam pointing stability deliver bestinclass performance among femtosecond micro machining products.
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